Cleaning and Process Tanks

Megasonic / Ultrasonic Cleaning Baths, Thermal Controlled Tanks, Wet Banches Stainless Steel / Quartz / Plastic tanks: Polypro- PVDF-PFA, Teflon Coated, Nitride Etch, Sulforic Peroxide cleans / Hot Phosphoric / KOH / Avid Etchants / Solvents (NMP, PGMEA, Resist Strip) / SC1 & SC2 cleans / Post CMP.